Bulk micromachined electrostatic RMS-to-DC converter
نویسندگان
چکیده
منابع مشابه
Bulk micromachined electrostatic RMS-to-DC converter
Bulk micromachining in silicon and glass wafers and subsequent silicon-to-glass anodic bonding have been used for the realization of an electrostatic rms-to-dc converter. A suspended membrane has been designed for: large dynamic operating range (detection limit by minimum mechanical-thermal noise and high value of the pull-in voltage), maximum bandwidth (low series resistance, high second harmo...
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ژورنال
عنوان ژورنال: IEEE Transactions on Instrumentation and Measurement
سال: 2001
ISSN: 0018-9456
DOI: 10.1109/19.982936